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International Journal of Information Technology & Computer Science ( IJITCS )

Abstract :

Advanced process control (APC) has been recognized as a proper tool for maximizing profitability of semiconductor manufacturing facilities by improving efficiency and product quality. Run-to-run (RtR) process control with good quality and reliable performance for APC applications are most applicable. This paper conducts performance assessment on four RtR mixed product control schemes which are available in the literature: thread EWMA (t-EWMA), thread PCC (tPCC), JADE and m-dEWMA, with actual overlay historical mixed product processes data. Meantime, the comparison also includes the moving average three (MA(3)) method which is commonly used in semiconductor factories. The simulation results revealed that t-EWMA, tPCC and m-dEWMA could be used in overlay mixed product processes, but the JADE was not recommended to be applied in overlay mixed product processes.

Keywords :

: advanced process control; run-to-run; overlay; mixed product; m-dEWMA control scheme;

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